Semitool equinox electroplating/electro-plater system

Semitool equinox electroplating/electro-plater system

Semitool Equinox Electroplating System, Model Number: EQ232PMCuELESS
Comes with a manual (on cd) and what you see in the pictures. If you don't see it, you probably wont get it.
Specifications are from Semitool and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
The Unit's Serial Number Tag Reads:
Power Requirements: 208 VAC, 3-Phase (5-Wire), 50/60 Hz
Largest Motor or Load: 10 Amps
Short Circuit Interrupt: 100,000 Amps
Date of Manufacture: May 22, 2002
Electric Diagram Number: 20792
Revision: 3.1 (Indicated in manual, not on tag)
The modular processing system offers a diverse capability with process chambers for spray, vapor, immersion, and electroplating applications, integrated into a single cluster tool. The Equinox is available as manual or fully-automated and can be configured with one to six chambers.
* Supports round or square substrates 75mm to 200mm
* Processes traditional and non-mainstream materials (e.g., glass, silicon, gallium arsenide, ceramic, lithium niobate, and indium phosphide)
* Device-side-down processing creates a thin, uniform boundary layer
* Controlled chemical distribution and wafer rotation
* Precise, repeatable and reliable process and system control
* Gold electroplating and deplating
* Copper damascene electroplating
* Patterned copper electroplating
For More Pictures Please Click the Following:
* Picture 6 - Front Controls & Indicators
* Picture 7 - Right Chamber Section
* Picture 8 - Left Chamber Section
* Picture 9 - Bottom-Front Panel Removed
* Picture 10 - Right Side View of Chambers
* Picture 11 - Right Side, Bottom Panel Removed #1
* Picture 12 - Right Side, Bottom Panel Removed #2
* Picture 13 - Right Side, Top Panel Removed
* Picture 14 - Left Side View of Chambers
* Picture 15 - Left Side, Bottom Panel Removed #1
* Picture 16 - Left Side, Bottom Panel Removed #2
* Picture 17 - Left Side, Top Panel Removed
* Picture 18 - Left Chamber Section
* Picture 19 - Back Side, Bottom Panel Removed
* Picture 20 - Photohelics on Back Side
* Picture 21 - Interfaces on Back Side
* Picture 22 - Facility Connections on Back Side
* Picture 24 - Serial Number Tag