Applied materials e-chuck power supply centura hdp ae

Applied materials e-chuck power supply centura hdp ae

Applied Materials E-chuck power supply. Used with Advanced Energy AZX63 RF Matches on Centura HDP Chambers for wafer bias. This units front panel is beat up. The boards inside look to be in perfect condition. There is a 15 pin male dsub and a female HN RF connector on the unit. Boards are:
AMAT Electrostatic Chuck Power Supply Bd. Assy. 0100-40033 Rev. P6 with Dell Electronics High Voltage Power supply, and Astec PS.
AMAT E-Chuck RF Filter Bd Assy. 0100-40034 REV. P5